Vacuum Systems
How to Compare Turbomolecular Pumps for Thin-Film Deposition Systems
Five system questions for comparing turbomolecular pumps used with coating and thin-film deposition chambers.
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Vacuum Systems
Vacuum pumps, gauges, conductance, chamber behavior and leak detection for deposition and research equipment.
Vacuum Systems
When the Chamber Is Tight but the Pressure Still Will Not Fall
A troubleshooting framework for separating leaks, water vapor, outgassing and conductance limits in vacuum equipment.
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Vacuum Systems
Helium Leak Testing: Localizing a Problem Instead of Guessing
How vacuum, sniffer, local and integral helium tests answer different questions about system tightness.
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Vacuum Systems
Pumping Speed and Ultimate Pressure Are Not the Same Specification
Why a larger pumping-speed number does not by itself guarantee a cleaner chamber or a lower operating pressure.
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